@article{6aa0ad04d8d6483d9611b03ce0d30265,
title = "Comparison of Grain Nucleation and Grain Growth during Crystallization of HWCVD and PECVD a-Si:H Films",
keywords = "annealing, crystallite nucleation, crystallization kinetics, hydrogenated amorphous silicon, nuclear magnetic resonance",
author = "H. Li and R.E.I. Schropp and Mahan, {A. Harv}",
year = "2008",
doi = "10.1016/j.tsf.2007.06.036",
language = "American English",
volume = "516",
pages = "529--532",
journal = "Thin Solid Films",
issn = "0040-6090",
publisher = "Elsevier B.V.",
number = "5",
}