A Novel Hardmask-to-Substrate Pattern Transfer Method for Creating 3D, Multi-Level, Hierarchical, High Aspect-Ratio Structures for Applications in Microfluidics and Cooling Technologies

Sougata Hazra, Chi Zhang, Qianying Wu, Mehdi Asheghi, Kenneth Goodson, Ercan Dede, James Palko, Sreekant Narumanchi

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4 Scopus Citations

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Material Science