A Reflectance Spectroscopy-Based Tool for High-Speed Characterization of Silicon Wafers and Solar Cells in Commercial Production

B. Sopori; P. Rupnowski; D. Guhabiswas; S. Devayajanam; S. Shet; C. P. Khattak; M. Albert

doi:10.1109/PVSC.2010.5616540

A Reflectance Spectroscopy-Based Tool for High-Speed Characterization of Silicon Wafers and Solar Cells in Commercial Production

B. Sopori, P. Rupnowski, D. Guhabiswas, S. Devayajanam, S. Shet, C. P. Khattak, M. Albert

Materials Science

Research output: Contribution to conference › Paper › peer-review

8 Scopus Citations

Abstract

Some new applications of reflectance spectroscopy using the GT FabScan are described, which make this system highly desirable for process monitoring in commercial Si solar cell fabrication. These applications include grain orientation, grain size distribution, dislocation density distribution, and antireflection coating thickness on a finished solar cell. These measurements are performed very fast, typically in less than 10 ms over the entire wafer.

Original language	American English
Pages	2238-2241
Number of pages	4
DOIs	https://doi.org/10.1109/PVSC.2010.5616540 https://doi.org/10.1109/PVSC.2010.5616540
State	Published - 2010
Event	35th IEEE Photovoltaic Specialists Conference, PVSC 2010 - Honolulu, HI, United States Duration: 20 Jun 2010 → 25 Jun 2010

Conference

Conference	35th IEEE Photovoltaic Specialists Conference, PVSC 2010
Country/Territory	United States
City	Honolulu, HI
Period	20/06/10 → 25/06/10

NREL Publication Number

NREL/CP-520-47730

Keywords

photovoltaic cells
reflectance spectroscopy
silicon wafers

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Sopori, B., Rupnowski, P., Guhabiswas, D., Devayajanam, S., Shet, S., Khattak, C. P., & Albert, M. (2010). A Reflectance Spectroscopy-Based Tool for High-Speed Characterization of Silicon Wafers and Solar Cells in Commercial Production. 2238-2241. Paper presented at 35th IEEE Photovoltaic Specialists Conference, PVSC 2010, Honolulu, HI, United States. https://doi.org/10.1109/PVSC.2010.5616540, https://doi.org/10.1109/PVSC.2010.5616540

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title = "A Reflectance Spectroscopy-Based Tool for High-Speed Characterization of Silicon Wafers and Solar Cells in Commercial Production",

abstract = "Some new applications of reflectance spectroscopy using the GT FabScan are described, which make this system highly desirable for process monitoring in commercial Si solar cell fabrication. These applications include grain orientation, grain size distribution, dislocation density distribution, and antireflection coating thickness on a finished solar cell. These measurements are performed very fast, typically in less than 10 ms over the entire wafer.",

keywords = "photovoltaic cells, reflectance spectroscopy, silicon wafers",

author = "B. Sopori and P. Rupnowski and D. Guhabiswas and S. Devayajanam and S. Shet and Khattak, {C. P.} and M. Albert",

year = "2010",

doi = "10.1109/PVSC.2010.5616540",

language = "American English",

pages = "2238--2241",

note = "35th IEEE Photovoltaic Specialists Conference, PVSC 2010 ; Conference date: 20-06-2010 Through 25-06-2010",

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Sopori, B, Rupnowski, P, Guhabiswas, D, Devayajanam, S, Shet, S, Khattak, CP & Albert, M 2010, 'A Reflectance Spectroscopy-Based Tool for High-Speed Characterization of Silicon Wafers and Solar Cells in Commercial Production', Paper presented at 35th IEEE Photovoltaic Specialists Conference, PVSC 2010, Honolulu, HI, United States, 20/06/10 - 25/06/10 pp. 2238-2241. https://doi.org/10.1109/PVSC.2010.5616540, https://doi.org/10.1109/PVSC.2010.5616540

A Reflectance Spectroscopy-Based Tool for High-Speed Characterization of Silicon Wafers and Solar Cells in Commercial Production. / Sopori, B.; Rupnowski, P.; Guhabiswas, D. et al.
2010. 2238-2241 Paper presented at 35th IEEE Photovoltaic Specialists Conference, PVSC 2010, Honolulu, HI, United States.

Research output: Contribution to conference › Paper › peer-review

TY - CONF

T1 - A Reflectance Spectroscopy-Based Tool for High-Speed Characterization of Silicon Wafers and Solar Cells in Commercial Production

AU - Sopori, B.

AU - Rupnowski, P.

AU - Guhabiswas, D.

AU - Devayajanam, S.

AU - Shet, S.

AU - Khattak, C. P.

AU - Albert, M.

PY - 2010

Y1 - 2010

N2 - Some new applications of reflectance spectroscopy using the GT FabScan are described, which make this system highly desirable for process monitoring in commercial Si solar cell fabrication. These applications include grain orientation, grain size distribution, dislocation density distribution, and antireflection coating thickness on a finished solar cell. These measurements are performed very fast, typically in less than 10 ms over the entire wafer.

AB - Some new applications of reflectance spectroscopy using the GT FabScan are described, which make this system highly desirable for process monitoring in commercial Si solar cell fabrication. These applications include grain orientation, grain size distribution, dislocation density distribution, and antireflection coating thickness on a finished solar cell. These measurements are performed very fast, typically in less than 10 ms over the entire wafer.

KW - photovoltaic cells

KW - reflectance spectroscopy

KW - silicon wafers

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DO - 10.1109/PVSC.2010.5616540

M3 - Paper

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T2 - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010

Y2 - 20 June 2010 through 25 June 2010

ER -

Sopori B, Rupnowski P, Guhabiswas D, Devayajanam S, Shet S, Khattak CP et al.. A Reflectance Spectroscopy-Based Tool for High-Speed Characterization of Silicon Wafers and Solar Cells in Commercial Production. 2010. Paper presented at 35th IEEE Photovoltaic Specialists Conference, PVSC 2010, Honolulu, HI, United States. doi: 10.1109/PVSC.2010.5616540, 10.1109/PVSC.2010.5616540

A Reflectance Spectroscopy-Based Tool for High-Speed Characterization of Silicon Wafers and Solar Cells in Commercial Production

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