A Simple Method for the Preparation of Transparent p-type Ca-Doped CuInO2 Films: Pulsed-Laser Deposition from Air-Sintered Ca-Doped Cu2In2O5 Targets

Charles W. Teplin, Tatiana Kaydanova, David L. Young, John D. Perkins, David S. Ginley, Aiko Ode, Dennis W. Readey

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Abstract

We report the deposition of single-phase undoped and Ca-doped CuInO 2 thin films from a readily synthesized source target of Cu 2In 2O 5 - circumventing the very difficult fabrication of CuInO 2 targets. X-ray diffraction shows that single-phase materials were obtained over a range of substrate temperatures and deposition pressures. p-type conductivities are measured to be ∼3×10 -3 S/cm, comparable to the best films previously reported. The optical properties of the films were measured by spectroscopic ellipsometry.

Original languageAmerican English
Pages (from-to)3789-3791
Number of pages3
JournalApplied Physics Letters
Volume85
Issue number17
DOIs
StatePublished - 25 Oct 2004

NREL Publication Number

  • NREL/JA-520-37459

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