Abstract
We report the deposition of single-phase undoped and Ca-doped CuInO 2 thin films from a readily synthesized source target of Cu 2In 2O 5 - circumventing the very difficult fabrication of CuInO 2 targets. X-ray diffraction shows that single-phase materials were obtained over a range of substrate temperatures and deposition pressures. p-type conductivities are measured to be ∼3×10 -3 S/cm, comparable to the best films previously reported. The optical properties of the films were measured by spectroscopic ellipsometry.
Original language | American English |
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Pages (from-to) | 3789-3791 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 85 |
Issue number | 17 |
DOIs | |
State | Published - 25 Oct 2004 |
NREL Publication Number
- NREL/JA-520-37459