Absence of a Steady State in Hydrogen Diluted Silane Plasmas Due to Mass Dependent Gas Pumping Speeds and It's Consequences

Research output: Contribution to conferencePaper

Original languageAmerican English
Pages55-59
Number of pages5
StatePublished - 2002
EventAmorphous and Heterogeneous Silicon-Based Films 2002: Materials Research Society Symposium - San Francisco, California
Duration: 2 Apr 20025 Apr 2002

Conference

ConferenceAmorphous and Heterogeneous Silicon-Based Films 2002: Materials Research Society Symposium
CitySan Francisco, California
Period2/04/025/04/02

Bibliographical note

Work performed by BP Solar, Toano, Virginia

NREL Publication Number

  • NREL/CP-520-34491

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