| Original language | American English |
|---|---|
| Pages (from-to) | 265-268 |
| Number of pages | 4 |
| Journal | Journal of vacuum science & technology |
| Volume | 15 |
| Issue number | 2 |
| DOIs | |
| State | Published - 1978 |
NREL Publication Number
- ACNR/JA-213-3540
Research output: Contribution to journal › Article
| Original language | American English |
|---|---|
| Pages (from-to) | 265-268 |
| Number of pages | 4 |
| Journal | Journal of vacuum science & technology |
| Volume | 15 |
| Issue number | 2 |
| DOIs | |
| State | Published - 1978 |