Advanced Superimposed Sputtering of Amorphous Indium Zinc Oxide Transparent Conductors for Energy Applications

J. E. Leisch; M. C. Gallante; J. J. Berry; T. Gennett; J. D. Perkins; D. S. Ginley

doi:10.1109/PVSC.2010.5614062

Advanced Superimposed Sputtering of Amorphous Indium Zinc Oxide Transparent Conductors for Energy Applications

J. E. Leisch, M. C. Gallante, J. J. Berry, T. Gennett, J. D. Perkins, D. S. Ginley

Materials, Chemical, and Computational Science

Research output: Contribution to conference › Paper › peer-review

1 Scopus Citations

Abstract

In this work, we investigate the use of RF, DC, and mixed RF/DC magnetron sputtering and its effect on the optoelectronic properties of amorphous Indium Zinc Oxide (IZO) films sputtered from an 87/13 wt% ceramic target. The effect of oxygen concentration in the sputter gas is examined at several RF/DC power ratios and a variety of total powers to help optimize conductivity. We find that higher conductivities can be achieved at 50% of the typical DC sputtering oxygen concentration when duplicated via mixed RF/DC sputtering. By combining the two, mixed RF/DC sputtering allows for the high deposition rates of typical DC sputter deposition, while obtaining the greater conductivities and transparencies assisted by RF sputtering.

Original language	American English
Pages	2457-2458
Number of pages	2
DOIs	https://doi.org/10.1109/PVSC.2010.5614062 https://doi.org/10.1109/PVSC.2010.5614062
State	Published - 2010
Event	35th IEEE Photovoltaic Specialists Conference, PVSC 2010 - Honolulu, HI, United States Duration: 20 Jun 2010 → 25 Jun 2010

Conference

Conference	35th IEEE Photovoltaic Specialists Conference, PVSC 2010
Country/Territory	United States
City	Honolulu, HI
Period	20/06/10 → 25/06/10

NREL Publication Number

NREL/CP-520-47709

Keywords

solar cells
transparent conducting oxides

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Leisch, J. E., Gallante, M. C., Berry, J. J., Gennett, T., Perkins, J. D., & Ginley, D. S. (2010). Advanced Superimposed Sputtering of Amorphous Indium Zinc Oxide Transparent Conductors for Energy Applications. 2457-2458. Paper presented at 35th IEEE Photovoltaic Specialists Conference, PVSC 2010, Honolulu, HI, United States. https://doi.org/10.1109/PVSC.2010.5614062, https://doi.org/10.1109/PVSC.2010.5614062

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abstract = "In this work, we investigate the use of RF, DC, and mixed RF/DC magnetron sputtering and its effect on the optoelectronic properties of amorphous Indium Zinc Oxide (IZO) films sputtered from an 87/13 wt% ceramic target. The effect of oxygen concentration in the sputter gas is examined at several RF/DC power ratios and a variety of total powers to help optimize conductivity. We find that higher conductivities can be achieved at 50% of the typical DC sputtering oxygen concentration when duplicated via mixed RF/DC sputtering. By combining the two, mixed RF/DC sputtering allows for the high deposition rates of typical DC sputter deposition, while obtaining the greater conductivities and transparencies assisted by RF sputtering.",

keywords = "solar cells, transparent conducting oxides",

author = "Leisch, {J. E.} and Gallante, {M. C.} and Berry, {J. J.} and T. Gennett and Perkins, {J. D.} and Ginley, {D. S.}",

year = "2010",

doi = "10.1109/PVSC.2010.5614062",

language = "American English",

pages = "2457--2458",

note = "35th IEEE Photovoltaic Specialists Conference, PVSC 2010 ; Conference date: 20-06-2010 Through 25-06-2010",

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Leisch, JE, Gallante, MC, Berry, JJ , Gennett, T, Perkins, JD & Ginley, DS 2010, 'Advanced Superimposed Sputtering of Amorphous Indium Zinc Oxide Transparent Conductors for Energy Applications', Paper presented at 35th IEEE Photovoltaic Specialists Conference, PVSC 2010, Honolulu, HI, United States, 20/06/10 - 25/06/10 pp. 2457-2458. https://doi.org/10.1109/PVSC.2010.5614062, https://doi.org/10.1109/PVSC.2010.5614062

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T1 - Advanced Superimposed Sputtering of Amorphous Indium Zinc Oxide Transparent Conductors for Energy Applications

AU - Leisch, J. E.

AU - Gallante, M. C.

AU - Berry, J. J.

AU - Gennett, T.

AU - Perkins, J. D.

AU - Ginley, D. S.

PY - 2010

Y1 - 2010

N2 - In this work, we investigate the use of RF, DC, and mixed RF/DC magnetron sputtering and its effect on the optoelectronic properties of amorphous Indium Zinc Oxide (IZO) films sputtered from an 87/13 wt% ceramic target. The effect of oxygen concentration in the sputter gas is examined at several RF/DC power ratios and a variety of total powers to help optimize conductivity. We find that higher conductivities can be achieved at 50% of the typical DC sputtering oxygen concentration when duplicated via mixed RF/DC sputtering. By combining the two, mixed RF/DC sputtering allows for the high deposition rates of typical DC sputter deposition, while obtaining the greater conductivities and transparencies assisted by RF sputtering.

AB - In this work, we investigate the use of RF, DC, and mixed RF/DC magnetron sputtering and its effect on the optoelectronic properties of amorphous Indium Zinc Oxide (IZO) films sputtered from an 87/13 wt% ceramic target. The effect of oxygen concentration in the sputter gas is examined at several RF/DC power ratios and a variety of total powers to help optimize conductivity. We find that higher conductivities can be achieved at 50% of the typical DC sputtering oxygen concentration when duplicated via mixed RF/DC sputtering. By combining the two, mixed RF/DC sputtering allows for the high deposition rates of typical DC sputter deposition, while obtaining the greater conductivities and transparencies assisted by RF sputtering.

KW - solar cells

KW - transparent conducting oxides

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DO - 10.1109/PVSC.2010.5614062

M3 - Paper

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SP - 2457

EP - 2458

T2 - 35th IEEE Photovoltaic Specialists Conference, PVSC 2010

Y2 - 20 June 2010 through 25 June 2010

ER -

Advanced Superimposed Sputtering of Amorphous Indium Zinc Oxide Transparent Conductors for Energy Applications

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Keywords

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