Aluminum Gettering of Gold in Single-Crystal Silicon

Aluminum Gettering of Gold in Single-Crystal Silicon

Research output: Contribution to conference › Paper

Original language	American English
Pages	202-205
Number of pages	4
State	Published - 1997
Event	Seventh Workshop on the Role of Impurities and Defects in Silicon Device Processing - Vail, Colorado Duration: 11 Aug 1997 → 13 Aug 1997

Conference

Conference	Seventh Workshop on the Role of Impurities and Defects in Silicon Device Processing
City	Vail, Colorado
Period	11/08/97 → 13/08/97

Bibliographical note

Work performed by Duke University, Durham, North Carolina

NREL Publication Number

NREL/CP-23618

Cite this

@conference{0e548953b1e244c38b2a46d369073b29,

title = "Aluminum Gettering of Gold in Single-Crystal Silicon",

author = "NREL",

note = "Work performed by Duke University, Durham, North Carolina; Seventh Workshop on the Role of Impurities and Defects in Silicon Device Processing ; Conference date: 11-08-1997 Through 13-08-1997",

year = "1997",

language = "American English",

pages = "202--205",

}