Abstract
Amorphous InZnO's (a-IZO) basic PV applicability has now been demonstrated in prototype CIGS, Si Heterojunction (SiHJ) and organic photovoltaics (OPV). However, to move beyond initial demonstration devices, improved TCO properties and processibility of the a-IZO films are needed. Here, RF-superimposed DC sputtering was used to improve the reliable deposition of a-IZO with conductivity σ > 3000 S/cm.
Original language | American English |
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Pages | 3646-3648 |
Number of pages | 3 |
DOIs | |
State | Published - 2011 |
Event | 37th IEEE Photovoltaic Specialists Conference, PVSC 2011 - Seattle, WA, United States Duration: 19 Jun 2011 → 24 Jun 2011 |
Conference
Conference | 37th IEEE Photovoltaic Specialists Conference, PVSC 2011 |
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Country/Territory | United States |
City | Seattle, WA |
Period | 19/06/11 → 24/06/11 |
Bibliographical note
See NREL/CP-5200-50822 for preprintNREL Publication Number
- NREL/CP-5200-55750