Amorphous Silicon Deposited at High Growth Rates Near the Onset of Microcrystallinity

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Pages (from-to)450-454
Number of pages5
JournalJournal of Non-Crystalline Solids
StatePublished - 2000

Bibliographical note

Work performed by University of Oregon, Eugene, Oregon; Tsukuba-shi, Ibaraki, Japan; Solarex, Toano, Virginia

NREL Publication Number

  • NREL/JA-520-28669

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