@article{ee169750d11f4184ac2cfbdd4c05c678,
title = "Amorphous Silicon Deposition Rates in Diode and Triode Discharges",
author = "NREL",
note = "Work performed by Joint Institute for Laboratory Astrophysics, National Bureau of Standards and University of Colorado, Boulder, Colorado",
year = "1986",
doi = "10.1063/1.337312",
language = "American English",
volume = "60",
pages = "1369--1373",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "4",
}