Amorphous Silicon Germanium Alloy Film Deposition with In Situ Plasma Diagnostics

Research output: Contribution to journal › Article

Work performed by Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California

NREL Publication Number

@article{bdb68fcef29b4006b44b52bc79a77e07,

title = "Amorphous Silicon Germanium Alloy Film Deposition with In Situ Plasma Diagnostics",

author = "NREL",

note = "Work performed by Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California",

year = "1988",

doi = "10.1016/0379-6787(88)90087-7",

language = "American English",

volume = "24",

pages = "353--362",

journal = "Solar Cells",

issn = "0379-6787",

publisher = "Elsevier B.V.",

number = "3-4",

}

TY - JOUR

T1 - Amorphous Silicon Germanium Alloy Film Deposition with In Situ Plasma Diagnostics

AU - NREL, null

N1 - Work performed by Jet Propulsion Laboratory, California Institute of Technology, Pasadena, California

PY - 1988

Y1 - 1988

U2 - 10.1016/0379-6787(88)90087-7

DO - 10.1016/0379-6787(88)90087-7

M3 - Article

SN - 0379-6787

VL - 24

SP - 353

EP - 362

JO - Solar Cells

JF - Solar Cells

IS - 3-4

ER -