Analysis of Plasma Properties and Deposition of Amorphous Silicon Alloy Solar Cells Using Very High Frequency Glow Discharge

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Number of pages6
    StatePublished - 1999
    EventMaterials Research Society Symposium - San Francisco, California
    Duration: 5 Apr 19999 Apr 1999


    ConferenceMaterials Research Society Symposium
    CitySan Francisco, California

    Bibliographical note

    Work performed by United Solar Systems Corp., Troy, Michigan; and JILA, National Institute of Standards and Technology and University of Colorado, Boulder, Colorado

    NREL Publication Number

    • NREL/CP-520-28442

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