| Original language | American English |
|---|---|
| Patent number | 5,396,332 |
| State | Published - 1995 |
NREL Publication Number
- ACNR/PT-16456
Apparatus and Method for Measuring the Thickness of a Semiconductor Wafer
NREL (Inventor)
Research output: Patent
NREL (Inventor)
Research output: Patent
| Original language | American English |
|---|---|
| Patent number | 5,396,332 |
| State | Published - 1995 |