@article{c45c261709e841b49dcaac3ff952139a,
title = "Apparatus Design for Glow-Discharge a-Si:H Film-Deposition",
author = "NREL",
note = "Work performed by Joint Institute for Laboratory Astrophysics, National Bureau of Standards and University of Colorado, Boulder, Colorado",
year = "1988",
doi = "10.1080/01425918708914428",
language = "American English",
volume = "5",
pages = "311--322",
journal = "International Journal of Solar Energy",
issn = "0142-5919",
publisher = "Taylor and Francis Ltd.",
number = "5-6",
}