Application of PECVD for Bulk and Surface Passivation of High Efficiency Silicon Solar Cells

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Pages116-119
    Number of pages4
    StatePublished - 1995
    EventFifth Workshop on the Role of Impurities and Defects in Silicon Device Processing: Workshop - Copper Mountain, Colorado
    Duration: 13 Aug 199516 Aug 1995

    Conference

    ConferenceFifth Workshop on the Role of Impurities and Defects in Silicon Device Processing: Workshop
    CityCopper Mountain, Colorado
    Period13/08/9516/08/95

    Bibliographical note

    Work performed by the University Center of Excellence in Photovoltaic Research and Education, Georgia Institute of Technology, Atlanta, Georgia

    NREL Publication Number

    • NREL/CP-20067

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