Applications of Real-Time and Mapping Spectroscopic Ellipsometry for Process Development and Optimization in Hydrogenated Silicon Thin-Film Photovoltaics Technology

Lila Dahal, Jason Stoke, Zhiquan Huang, Ambalanath Shan, Andre Ferlauto, Christopher Wronski, Robert Collins, Nikolas Podraza

    Research output: Contribution to journalArticlepeer-review

    Original languageAmerican English
    Pages (from-to)32-56
    Number of pages25
    JournalSolar Energy Materials and Solar Cells
    StatePublished - 2014

    NREL Publication Number

    • NREL/JA-5J00-62794

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