Applications of Real-Time and Mapping Spectroscopic Ellipsometry for Process Development and Optimization in Hydrogenated Silicon Thin-Film Photovoltaics Technology

Lila Dahal; Jason Stoke; Zhiquan Huang; Ambalanath Shan; Andre Ferlauto; Christopher Wronski; Robert Collins; Nikolas Podraza

doi:10.1016/j.solmat.2014.01.028

Applications of Real-Time and Mapping Spectroscopic Ellipsometry for Process Development and Optimization in Hydrogenated Silicon Thin-Film Photovoltaics Technology

Lila Dahal, Jason Stoke, Zhiquan Huang, Ambalanath Shan, Andre Ferlauto, Christopher Wronski, Robert Collins, Nikolas Podraza

Research output: Contribution to journal › Article › peer-review

Original language	American English
Pages (from-to)	32-56
Number of pages	25
Journal	Solar Energy Materials and Solar Cells
Volume	129
DOIs	https://doi.org/10.1016/j.solmat.2014.01.028
State	Published - 2014

NREL Publication Number

NREL/JA-5J00-62794

Access to Document

10.1016/j.solmat.2014.01.028

Cite this

@article{9e8ee217ed1a49f380777dc53f3015d7,

title = "Applications of Real-Time and Mapping Spectroscopic Ellipsometry for Process Development and Optimization in Hydrogenated Silicon Thin-Film Photovoltaics Technology",

author = "Lila Dahal and Jason Stoke and Zhiquan Huang and Ambalanath Shan and Andre Ferlauto and Christopher Wronski and Robert Collins and Nikolas Podraza",

year = "2014",

doi = "10.1016/j.solmat.2014.01.028",

language = "American English",

volume = "129",

pages = "32--56",

journal = "Solar Energy Materials and Solar Cells",

issn = "0927-0248",

publisher = "Elsevier BV",

}

TY - JOUR

T1 - Applications of Real-Time and Mapping Spectroscopic Ellipsometry for Process Development and Optimization in Hydrogenated Silicon Thin-Film Photovoltaics Technology

AU - Dahal, Lila

AU - Stoke, Jason

AU - Huang, Zhiquan

AU - Shan, Ambalanath

AU - Ferlauto, Andre

AU - Wronski, Christopher

AU - Collins, Robert

AU - Podraza, Nikolas

PY - 2014

Y1 - 2014

U2 - 10.1016/j.solmat.2014.01.028

DO - 10.1016/j.solmat.2014.01.028

M3 - Article

SN - 0927-0248

VL - 129

SP - 32

EP - 56

JO - Solar Energy Materials and Solar Cells

JF - Solar Energy Materials and Solar Cells

ER -