| Original language | American English |
|---|---|
| Pages (from-to) | 90-91 |
| Number of pages | 2 |
| Journal | Journal of vacuum science & technology |
| Volume | 17 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1980 |
NREL Publication Number
- ACNR/JA-255-2890
| Original language | American English |
|---|---|
| Pages (from-to) | 90-91 |
| Number of pages | 2 |
| Journal | Journal of vacuum science & technology |
| Volume | 17 |
| Issue number | 1 |
| DOIs | |
| State | Published - 1980 |