Argon Sputtering Analysis of the Growing Surface of a-Si:H Films

Research output: Contribution to journal › Article

Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and National Bureau of Standards, Boulder, Colorado

NREL Publication Number

@article{64211657bfec4fdcae80766ed31abb3f,

title = "Argon Sputtering Analysis of the Growing Surface of a-Si:H Films",

author = "NREL",

note = "Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and National Bureau of Standards, Boulder, Colorado",

year = "1988",

doi = "10.1063/1.341461",

language = "American English",

volume = "64",

pages = "188--194",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "1",

}

TY - JOUR

T1 - Argon Sputtering Analysis of the Growing Surface of a-Si:H Films

AU - NREL, null

N1 - Work performed by Joint Institute for Laboratory Astrophysics, University of Colorado, and National Bureau of Standards, Boulder, Colorado

PY - 1988

Y1 - 1988

U2 - 10.1063/1.341461

DO - 10.1063/1.341461

M3 - Article

SN - 0021-8979

VL - 64

SP - 188

EP - 194

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 1

ER -