Auger Line Shape Analysis of Hydrogenated Amorphous Silicon

N. A. Burnham; A. B. Swartzlander; A. J. Nelson; L. L. Kazmerski

doi:10.1016/0379-6787(87)90112-8

Auger Line Shape Analysis of Hydrogenated Amorphous Silicon

N. A. Burnham, A. B. Swartzlander, A. J. Nelson, L. L. Kazmerski

Materials Science

National Renewable Energy Laboratory

Research output: Contribution to journal › Article › peer-review

3 Scopus Citations

Abstract

Auger line shape analysis of the Si L₂₃ VV peak of hydrogenated amorphous silicon samples has been performed. Both ion-implanted and glow discharge samples were analyzed. Hydrogen concentrations were established by IR and secondary ion mass spectroscopies. The L₂₃ VV peak was deconvoluted into its L₂₃M₁M₂₃, L₂₃M₂₃M₂₃ and localized two-hole components. The relative amounts of the L₂₃ VV components were compared with the hydrogen concentration. The results show that Auger line shape analysis may be used as (i) a semiquantitative monitor of the hydrogenation of amorphous silicon and (ii) a probe of the valence band of hydrogenated amorphous silicon.

Original language	American English
Pages (from-to)	135-140
Number of pages	6
Journal	Solar Cells
Volume	21
Issue number	1-4
DOIs	https://doi.org/10.1016/0379-6787(87)90112-8 https://doi.org/10.1016/0379-6787(87)90112-8
State	Published - 1987

NREL Publication Number

ACNR/JA-213-7749

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title = "Auger Line Shape Analysis of Hydrogenated Amorphous Silicon",

abstract = "Auger line shape analysis of the Si L23 VV peak of hydrogenated amorphous silicon samples has been performed. Both ion-implanted and glow discharge samples were analyzed. Hydrogen concentrations were established by IR and secondary ion mass spectroscopies. The L23 VV peak was deconvoluted into its L23M1M23, L23M23M23 and localized two-hole components. The relative amounts of the L23 VV components were compared with the hydrogen concentration. The results show that Auger line shape analysis may be used as (i) a semiquantitative monitor of the hydrogenation of amorphous silicon and (ii) a probe of the valence band of hydrogenated amorphous silicon.",

author = "Burnham, {N. A.} and Swartzlander, {A. B.} and Nelson, {A. J.} and Kazmerski, {L. L.}",

year = "1987",

doi = "10.1016/0379-6787(87)90112-8",

language = "American English",

volume = "21",

pages = "135--140",

journal = "Solar Cells",

issn = "0379-6787",

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T1 - Auger Line Shape Analysis of Hydrogenated Amorphous Silicon

AU - Burnham, N. A.

AU - Swartzlander, A. B.

AU - Nelson, A. J.

AU - Kazmerski, L. L.

PY - 1987

Y1 - 1987

N2 - Auger line shape analysis of the Si L23 VV peak of hydrogenated amorphous silicon samples has been performed. Both ion-implanted and glow discharge samples were analyzed. Hydrogen concentrations were established by IR and secondary ion mass spectroscopies. The L23 VV peak was deconvoluted into its L23M1M23, L23M23M23 and localized two-hole components. The relative amounts of the L23 VV components were compared with the hydrogen concentration. The results show that Auger line shape analysis may be used as (i) a semiquantitative monitor of the hydrogenation of amorphous silicon and (ii) a probe of the valence band of hydrogenated amorphous silicon.

AB - Auger line shape analysis of the Si L23 VV peak of hydrogenated amorphous silicon samples has been performed. Both ion-implanted and glow discharge samples were analyzed. Hydrogen concentrations were established by IR and secondary ion mass spectroscopies. The L23 VV peak was deconvoluted into its L23M1M23, L23M23M23 and localized two-hole components. The relative amounts of the L23 VV components were compared with the hydrogen concentration. The results show that Auger line shape analysis may be used as (i) a semiquantitative monitor of the hydrogenation of amorphous silicon and (ii) a probe of the valence band of hydrogenated amorphous silicon.

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DO - 10.1016/0379-6787(87)90112-8

M3 - Article

AN - SCOPUS:0022738420

SN - 0379-6787

VL - 21

SP - 135

EP - 140

JO - Solar Cells

JF - Solar Cells

IS - 1-4

ER -

Auger Line Shape Analysis of Hydrogenated Amorphous Silicon

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