Auger Line Shape Analysis of Hydrogenated Amorphous Silicon

N. A. Burnham, A. B. Swartzlander, A. J. Nelson, L. L. Kazmerski

Research output: Contribution to journalArticlepeer-review

3 Scopus Citations


Auger line shape analysis of the Si L23 VV peak of hydrogenated amorphous silicon samples has been performed. Both ion-implanted and glow discharge samples were analyzed. Hydrogen concentrations were established by IR and secondary ion mass spectroscopies. The L23 VV peak was deconvoluted into its L23M1M23, L23M23M23 and localized two-hole components. The relative amounts of the L23 VV components were compared with the hydrogen concentration. The results show that Auger line shape analysis may be used as (i) a semiquantitative monitor of the hydrogenation of amorphous silicon and (ii) a probe of the valence band of hydrogenated amorphous silicon.

Original languageAmerican English
Pages (from-to)135-140
Number of pages6
JournalSolar Cells
Issue number1-4
StatePublished - 1987

NREL Publication Number

  • ACNR/JA-213-7749


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