Autonomous Sputter Synthesis of Thin Film Nitrides with Composition Controlled by Bayesian Optimization of Optical Plasma Emission: Article No. 071119

Davi Febba, Kevin Talley, Kendal Johnson, Stephen Schaefer, Sage Bauers, John Mangum, Rebecca Smaha, Andriy Zakutayev

Research output: Contribution to journal › Article › peer-review

1 Scopus Citations

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