AVS Short Courses for Scientists, Engineers, and Technologists

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)1412-1417
    Number of pages6
    JournalJournal of vacuum science & technology
    Volume20
    Issue number4
    DOIs
    StatePublished - 1982

    NREL Publication Number

    • ACNR/JA-255-2886

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