| Original language | American English |
|---|---|
| Pages (from-to) | 1412-1417 |
| Number of pages | 6 |
| Journal | Journal of vacuum science & technology |
| Volume | 20 |
| Issue number | 4 |
| DOIs | |
| State | Published - 1982 |
NLR Publication Number
- ACNR/JA-255-2886
Research output: Contribution to journal › Article
| Original language | American English |
|---|---|
| Pages (from-to) | 1412-1417 |
| Number of pages | 6 |
| Journal | Journal of vacuum science & technology |
| Volume | 20 |
| Issue number | 4 |
| DOIs | |
| State | Published - 1982 |