BF3-Doped Amorphous Silicon Thin Films

Research output: Contribution to journal › Article

Original language	American English
Pages (from-to)	1033-1049
Number of pages	17
Journal	Journal of Electronic Materials
Volume	12
Issue number	6
DOIs	https://doi.org/10.1007/BF02654973
State	Published - 1983

NREL Publication Number

@article{4feb6290c9384f5cb3d91307a813938c,

title = "BF3-Doped Amorphous Silicon Thin Films",

author = "NREL",

year = "1983",

doi = "10.1007/BF02654973",

language = "American English",

volume = "12",

pages = "1033--1049",

journal = "Journal of Electronic Materials",

issn = "0361-5235",

publisher = "Springer New York",

number = "6",

}