Bismuth Surfactant Effects for GaAsN and Beryllium Doping of GaAsN and GaInAsN Grown by Molecular Beam Epitaxy

Ting Liu, Sandeep Chandril, A. J. Ptak, D. Korakakis, T. H. Myers

Research output: Contribution to journalArticlepeer-review

19 Scopus Citations

Abstract

Bi was investigated as a possible surfactant for growth of GaAs1-xNx layers on (1 0 0) GaAs substrates by molecular beam epitaxy (MBE) using a radio frequency (RF) plasma nitrogen source. Importantly, Bi extends the useable growth conditions producing smoother surfaces to a significantly higher group V fractional N content than without Bi, enhancing possibilities for growth of structures requiring a larger nitrogen content. The conductivity of Be-doped GaAsN and GaInAsN decreased significantly with increasing N concentration. Temperature-dependent Hall measurement suggests possible compensation and increased activation energy. SIMS and Raman measurements indicate that the N composition increased with introducing Be, and for low [N], with the presence of Bi. The addition of Bi during growth of Be-doped GaAsN only produced semi-insulating layers at all concentrations investigated suggesting it enhances the formation of compensating defects.

Original languageAmerican English
Pages (from-to)402-406
Number of pages5
JournalJournal of Crystal Growth
Volume304
Issue number2
DOIs
StatePublished - 2007

NREL Publication Number

  • NREL/JA-520-40488

Keywords

  • A1. Doping
  • A1. Surface processes
  • A3. Molecular beam epitaxy
  • B2. Semiconducting III-V materials

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