Abstract
Bi was investigated as a possible surfactant for growth of GaAs1-xNx layers on (1 0 0) GaAs substrates by molecular beam epitaxy (MBE) using a radio frequency (RF) plasma nitrogen source. Importantly, Bi extends the useable growth conditions producing smoother surfaces to a significantly higher group V fractional N content than without Bi, enhancing possibilities for growth of structures requiring a larger nitrogen content. The conductivity of Be-doped GaAsN and GaInAsN decreased significantly with increasing N concentration. Temperature-dependent Hall measurement suggests possible compensation and increased activation energy. SIMS and Raman measurements indicate that the N composition increased with introducing Be, and for low [N], with the presence of Bi. The addition of Bi during growth of Be-doped GaAsN only produced semi-insulating layers at all concentrations investigated suggesting it enhances the formation of compensating defects.
Original language | American English |
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Pages (from-to) | 402-406 |
Number of pages | 5 |
Journal | Journal of Crystal Growth |
Volume | 304 |
Issue number | 2 |
DOIs | |
State | Published - 2007 |
NREL Publication Number
- NREL/JA-520-40488
Keywords
- A1. Doping
- A1. Surface processes
- A3. Molecular beam epitaxy
- B2. Semiconducting III-V materials