Breakdown Physics of Low-Temperature Silicon Epitaxy Grown from Silane Radicals: Article No. 235428

Research output: Contribution to journal › Article › peer-review

Original language	American English
Number of pages	5
Journal	Physical Review B - Condensed Matter and Materials Physics
Volume	74
Issue number	23
DOIs	https://doi.org/10.1103/PhysRevB.74.235428
State	Published - 2006

NREL Publication Number

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title = "Breakdown Physics of Low-Temperature Silicon Epitaxy Grown from Silane Radicals: Article No. 235428",

author = "NREL",

year = "2006",

doi = "10.1103/PhysRevB.74.235428",

language = "American English",

volume = "74",

journal = "Physical Review B - Condensed Matter and Materials Physics",

issn = "1098-0121",

publisher = "American Physical Society",

number = "23",

}

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T1 - Breakdown Physics of Low-Temperature Silicon Epitaxy Grown from Silane Radicals

T2 - Article No. 235428

AU - NREL, null

PY - 2006

Y1 - 2006

U2 - 10.1103/PhysRevB.74.235428

DO - 10.1103/PhysRevB.74.235428

M3 - Article

SN - 1098-0121

VL - 74

JO - Physical Review B - Condensed Matter and Materials Physics

JF - Physical Review B - Condensed Matter and Materials Physics

IS - 23

ER -