Breakdown Physics of Low-Temperature Silicon Epitaxy Grown from Silane Radicals: Article No. 235428

Research output: Contribution to journalArticlepeer-review

Original languageAmerican English
Number of pages5
JournalPhysical Review B - Condensed Matter and Materials Physics
Volume74
Issue number23
DOIs
StatePublished - 2006

NREL Publication Number

  • NREL/JA-520-39778

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