Original language | American English |
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Pages (from-to) | 1239-1245 |
Number of pages | 7 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 5 |
Issue number | 4 |
DOIs | |
State | Published - 1987 |
NREL Publication Number
- ACNR/JA-212-9833