Chapter 3: Ion Beam Bombardment Effects on Solid Surfaces at Energies Used for Sputter Depth Profiling

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Original language	American English
Title of host publication	Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis
Editors	A. W. Czanderna, T. E. Madey, C. J. Powell
Pages	97-277
State	Published - 1998

NREL Publication Number

@inbook{d9e601c3320045edb71574ecb54cb521,

title = "Chapter 3: Ion Beam Bombardment Effects on Solid Surfaces at Energies Used for Sputter Depth Profiling",

author = "NREL",

year = "1998",

language = "American English",

pages = "97--277",

editor = "Czanderna, \{A. W.\} and Madey, \{T. E.\} and Powell, \{C. J.\}",

booktitle = "Beam Effects, Surface Topography, and Depth Profiling in Surface Analysis",

}