Characterization of Compositional Gradients in Amorphous Semiconductor Thin Films by Real Time Spectroscopic Ellipsometry

Characterization of Compositional Gradients in Amorphous Semiconductor Thin Films by Real Time Spectroscopic Ellipsometry

Research output: Contribution to conference › Paper

Original language	American English
Pages	15-20
Number of pages	6
State	Published - 1995
Event	Amorphous Silicon Technology 1995: Materials Research Society Symposium - San Francisco, California Duration: 18 Apr 1995 → 21 Apr 1995

Conference

Conference	Amorphous Silicon Technology 1995: Materials Research Society Symposium
City	San Francisco, California
Period	18/04/95 → 21/04/95

Bibliographical note

Work performed by the Pennsylvania State University, University Park, Pennsylvania

NREL Publication Number

NREL/CP-20834

Cite this

@conference{47af453b0ce74544935eb9adb72edd96,

title = "Characterization of Compositional Gradients in Amorphous Semiconductor Thin Films by Real Time Spectroscopic Ellipsometry",

author = "NREL",

note = "Work performed by the Pennsylvania State University, University Park, Pennsylvania; Amorphous Silicon Technology 1995: Materials Research Society Symposium ; Conference date: 18-04-1995 Through 21-04-1995",

year = "1995",

language = "American English",

pages = "15--20",

}

TY - CONF

T1 - Characterization of Compositional Gradients in Amorphous Semiconductor Thin Films by Real Time Spectroscopic Ellipsometry

AU - NREL, null

N1 - Work performed by the Pennsylvania State University, University Park, Pennsylvania

PY - 1995

Y1 - 1995

M3 - Paper

SP - 15

EP - 20

T2 - Amorphous Silicon Technology 1995: Materials Research Society Symposium

Y2 - 18 April 1995 through 21 April 1995

ER -