Characterization of Elastic Modulus Across the (Al1-xScx)N System Using DFT and Substrate-Effect-Corrected Nanoindentation

Dong Wu, Yachao Chen, Sukriti Manna, Kevin Talley, Andriy Zakutayev, Geoff L. Brennecka, Cristian V. Ciobanu, Paul Constantine, Corinne E. Packard

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