@article{df6b17ca6fcd41ff9488d96828782857,
title = "Characterization of GaAs Wafers and Epilayers with Electron-Beam-Induced Current, Etching, and Reflected Light",
author = "NREL",
note = "Work performed by Chevron Research Company, Richmond, California and Solar Energy Research Institute, Golden, Colorado",
year = "1987",
doi = "10.1063/1.339098",
language = "American English",
volume = "62",
pages = "4248--4254",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "10",
}