Characterization of Microcrystalline Transition from Amorphous Silicon as a Function of Hydrogen Dilution and Substrate Temperature of Hot-Wire CVD

Keda Wang, Haoyue Zhang, Jian Zhang, Jessica M. Owens, Jennifer Weinberg-Wolf, Daxing Han, Lynn Gedvilas, Brent Nelson

Research output: Contribution to conference › Paper › peer-review

Fingerprint

Dive into the research topics of 'Characterization of Microcrystalline Transition from Amorphous Silicon as a Function of Hydrogen Dilution and Substrate Temperature of Hot-Wire CVD'. Together they form a unique fingerprint.

Engineering

Material Science