Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)

Matthew P. Taylor, Dennis W. Readey, Charles W. Teplin, Maikel F.A.M. Van Hest, Jeff L. Alleman, Matthew S. Dabney, Lynn M. Gedvilas, Brian M. Keyes, Bobby To, Philip A. Parilla, John D. Perkins, David S. Ginley

Research output: Contribution to journalArticlepeer-review

18 Scopus Citations


Compositionally graded, combinatorial libraries of indium-doped zinc oxide (IZO) were grown by DC-magnetron sputtering on glass at 100 °C. The In content ranged from 5 to 50 cation-%. The highest conductivity, σ = 2 000 Ω-1 · cm-1 with μ = 25 cm2 · V-1 · s-1, was found at ≈50% In content with a visible transmittance greater than 80%. The (001) layer spacing increased from ≈2.6 to 2.85 Å as the In content increased from 5 to 50%.

Original languageAmerican English
Pages (from-to)344-347
Number of pages4
JournalMacromolecular Rapid Communications
Issue number1
StatePublished - 2004

NREL Publication Number

  • NREL/JA-520-35954


  • Coatings
  • Combinatorial
  • Indium zinc oxide
  • Sputtering
  • Thin films
  • Transparent conducting oxide


Dive into the research topics of 'Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)'. Together they form a unique fingerprint.

Cite this