Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)

Matthew P. Taylor; Dennis W. Readey; Charles W. Teplin; Maikel F.A.M. Van Hest; Jeff L. Alleman; Matthew S. Dabney; Lynn M. Gedvilas; Brian M. Keyes; Bobby To; Philip A. Parilla; John D. Perkins; David S. Ginley

doi:10.1002/marc.200300231

Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)

Matthew P. Taylor, Dennis W. Readey, Charles W. Teplin, Maikel F.A.M. Van Hest, Jeff L. Alleman, Matthew S. Dabney, Lynn M. Gedvilas, Brian M. Keyes, Bobby To, Philip A. Parilla, John D. Perkins, David S. Ginley

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Abstract

Compositionally graded, combinatorial libraries of indium-doped zinc oxide (IZO) were grown by DC-magnetron sputtering on glass at 100 °C. The In content ranged from 5 to 50 cation-%. The highest conductivity, σ = 2 000 Ω^-1 · cm^-1 with μ = 25 cm² · V^-1 · s^-1, was found at ≈50% In content with a visible transmittance greater than 80%. The (001) layer spacing increased from ≈2.6 to 2.85 Å as the In content increased from 5 to 50%.

Original language	American English
Pages (from-to)	344-347
Number of pages	4
Journal	Macromolecular Rapid Communications
Volume	25
Issue number	1
DOIs	https://doi.org/10.1002/marc.200300231 https://doi.org/10.1002/marc.200300231
State	Published - 2004

NREL Publication Number

NREL/JA-520-35954

Keywords

Coatings
Combinatorial
Indium zinc oxide
Sputtering
Thin films
Transparent conducting oxide

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Taylor, M. P., Readey, D. W., Teplin, C. W., Van Hest, M. F. A. M., Alleman, J. L., Dabney, M. S., Gedvilas, L. M., Keyes, B. M., To, B., Parilla, P. A., Perkins, J. D., & Ginley, D. S. (2004). Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO). Macromolecular Rapid Communications, 25(1), 344-347. https://doi.org/10.1002/marc.200300231, https://doi.org/10.1002/marc.200300231

@article{ca4424ae2f984f5d83fdf2a60db30e76,

title = "Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)",

abstract = "Compositionally graded, combinatorial libraries of indium-doped zinc oxide (IZO) were grown by DC-magnetron sputtering on glass at 100 °C. The In content ranged from 5 to 50 cation-%. The highest conductivity, σ = 2 000 Ω-1 · cm-1 with μ = 25 cm2 · V-1 · s-1, was found at ≈50% In content with a visible transmittance greater than 80%. The (001) layer spacing increased from ≈2.6 to 2.85 {\AA} as the In content increased from 5 to 50%.",

keywords = "Coatings, Combinatorial, Indium zinc oxide, Sputtering, Thin films, Transparent conducting oxide",

author = "Taylor, {Matthew P.} and Readey, {Dennis W.} and Teplin, {Charles W.} and {Van Hest}, {Maikel F.A.M.} and Alleman, {Jeff L.} and Dabney, {Matthew S.} and Gedvilas, {Lynn M.} and Keyes, {Brian M.} and Bobby To and Parilla, {Philip A.} and Perkins, {John D.} and Ginley, {David S.}",

year = "2004",

doi = "10.1002/marc.200300231",

language = "American English",

volume = "25",

pages = "344--347",

journal = "Macromolecular Rapid Communications",

issn = "1022-1336",

publisher = "Wiley-VCH Verlag",

number = "1",

}

Taylor, MP, Readey, DW, Teplin, CW, Van Hest, MFAM, Alleman, JL, Dabney, MS, Gedvilas, LM, Keyes, BM, To, B, Parilla, PA, Perkins, JD & Ginley, DS 2004, 'Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)', Macromolecular Rapid Communications, vol. 25, no. 1, pp. 344-347. https://doi.org/10.1002/marc.200300231, https://doi.org/10.1002/marc.200300231

TY - JOUR

T1 - Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)

AU - Taylor, Matthew P.

AU - Readey, Dennis W.

AU - Teplin, Charles W.

AU - Van Hest, Maikel F.A.M.

AU - Alleman, Jeff L.

AU - Dabney, Matthew S.

AU - Gedvilas, Lynn M.

AU - Keyes, Brian M.

AU - To, Bobby

AU - Parilla, Philip A.

AU - Perkins, John D.

AU - Ginley, David S.

PY - 2004

Y1 - 2004

N2 - Compositionally graded, combinatorial libraries of indium-doped zinc oxide (IZO) were grown by DC-magnetron sputtering on glass at 100 °C. The In content ranged from 5 to 50 cation-%. The highest conductivity, σ = 2 000 Ω-1 · cm-1 with μ = 25 cm2 · V-1 · s-1, was found at ≈50% In content with a visible transmittance greater than 80%. The (001) layer spacing increased from ≈2.6 to 2.85 Å as the In content increased from 5 to 50%.

AB - Compositionally graded, combinatorial libraries of indium-doped zinc oxide (IZO) were grown by DC-magnetron sputtering on glass at 100 °C. The In content ranged from 5 to 50 cation-%. The highest conductivity, σ = 2 000 Ω-1 · cm-1 with μ = 25 cm2 · V-1 · s-1, was found at ≈50% In content with a visible transmittance greater than 80%. The (001) layer spacing increased from ≈2.6 to 2.85 Å as the In content increased from 5 to 50%.

KW - Coatings

KW - Combinatorial

KW - Indium zinc oxide

KW - Sputtering

KW - Thin films

KW - Transparent conducting oxide

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U2 - 10.1002/marc.200300231

DO - 10.1002/marc.200300231

M3 - Article

AN - SCOPUS:10744223375

SN - 1022-1336

VL - 25

SP - 344

EP - 347

JO - Macromolecular Rapid Communications

JF - Macromolecular Rapid Communications

IS - 1

ER -

Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)

Abstract

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Keywords

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