Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)

Matthew P. Taylor; Dennis W. Readey; Charles W. Teplin; Maikel F.A.M. Van Hest; Jeff L. Alleman; Matthew S. Dabney; Lynn M. Gedvilas; Brian M. Keyes; Bobby To; Philip A. Parilla; John D. Perkins; David S. Ginley

doi:10.1002/marc.200300231

Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)

Matthew P. Taylor
, Dennis W. Readey
, Charles W. Teplin
, Maikel F.A.M. Van Hest
, Jeff L. Alleman
, Matthew S. Dabney
, Lynn M. Gedvilas
, Brian M. Keyes
, Bobby To
, Philip A. Parilla
, John D. Perkins
, David S. Ginley

Research output: Contribution to journal › Article › peer-review

18 Scopus Citations

Abstract

Compositionally graded, combinatorial libraries of indium-doped zinc oxide (IZO) were grown by DC-magnetron sputtering on glass at 100 °C. The In content ranged from 5 to 50 cation-%. The highest conductivity, σ = 2 000 Ω^-1 · cm^-1 with μ = 25 cm² · V^-1 · s^-1, was found at ≈50% In content with a visible transmittance greater than 80%. The (001) layer spacing increased from ≈2.6 to 2.85 Å as the In content increased from 5 to 50%.

Original language	American English
Pages (from-to)	344-347
Number of pages	4
Journal	Macromolecular Rapid Communications
Volume	25
Issue number	1
DOIs	https://doi.org/10.1002/marc.200300231 https://doi.org/10.1002/marc.200300231
State	Published - 2004

NLR Publication Number

NREL/JA-520-35954

Keywords

Coatings
Combinatorial
Indium zinc oxide
Sputtering
Thin films
Transparent conducting oxide

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Taylor, M. P., Readey, D. W., Teplin, C. W., Van Hest, M. F. A. M., Alleman, J. L., Dabney, M. S., Gedvilas, L. M., Keyes, B. M., To, B., Parilla, P. A., Perkins, J. D., & Ginley, D. S. (2004). Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO). Macromolecular Rapid Communications, 25(1), 344-347. https://doi.org/10.1002/marc.200300231, https://doi.org/10.1002/marc.200300231

@article{ca4424ae2f984f5d83fdf2a60db30e76,

title = "Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)",

abstract = "Compositionally graded, combinatorial libraries of indium-doped zinc oxide (IZO) were grown by DC-magnetron sputtering on glass at 100 °C. The In content ranged from 5 to 50 cation-\%. The highest conductivity, σ = 2 000 Ω-1 · cm-1 with μ = 25 cm2 · V-1 · s-1, was found at ≈50\% In content with a visible transmittance greater than 80\%. The (001) layer spacing increased from ≈2.6 to 2.85 {\AA} as the In content increased from 5 to 50\%.",

keywords = "Coatings, Combinatorial, Indium zinc oxide, Sputtering, Thin films, Transparent conducting oxide",

author = "Taylor, \{Matthew P.\} and Readey, \{Dennis W.\} and Teplin, \{Charles W.\} and \{Van Hest\}, \{Maikel F.A.M.\} and Alleman, \{Jeff L.\} and Dabney, \{Matthew S.\} and Gedvilas, \{Lynn M.\} and Keyes, \{Brian M.\} and Bobby To and Parilla, \{Philip A.\} and Perkins, \{John D.\} and Ginley, \{David S.\}",

year = "2004",

doi = "10.1002/marc.200300231",

language = "American English",

volume = "25",

pages = "344--347",

journal = "Macromolecular Rapid Communications",

issn = "1022-1336",

publisher = "Wiley-VCH Verlag",

number = "1",

}

Taylor, MP, Readey, DW, Teplin, CW, Van Hest, MFAM, Alleman, JL, Dabney, MS, Gedvilas, LM, Keyes, BM, To, B, Parilla, PA, Perkins, JD & Ginley, DS 2004, 'Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)', Macromolecular Rapid Communications, vol. 25, no. 1, pp. 344-347. https://doi.org/10.1002/marc.200300231, https://doi.org/10.1002/marc.200300231

TY - JOUR

T1 - Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)

AU - Taylor, Matthew P.

AU - Readey, Dennis W.

AU - Teplin, Charles W.

AU - Van Hest, Maikel F.A.M.

AU - Alleman, Jeff L.

AU - Dabney, Matthew S.

AU - Gedvilas, Lynn M.

AU - Keyes, Brian M.

AU - To, Bobby

AU - Parilla, Philip A.

AU - Perkins, John D.

AU - Ginley, David S.

PY - 2004

Y1 - 2004

N2 - Compositionally graded, combinatorial libraries of indium-doped zinc oxide (IZO) were grown by DC-magnetron sputtering on glass at 100 °C. The In content ranged from 5 to 50 cation-%. The highest conductivity, σ = 2 000 Ω-1 · cm-1 with μ = 25 cm2 · V-1 · s-1, was found at ≈50% In content with a visible transmittance greater than 80%. The (001) layer spacing increased from ≈2.6 to 2.85 Å as the In content increased from 5 to 50%.

AB - Compositionally graded, combinatorial libraries of indium-doped zinc oxide (IZO) were grown by DC-magnetron sputtering on glass at 100 °C. The In content ranged from 5 to 50 cation-%. The highest conductivity, σ = 2 000 Ω-1 · cm-1 with μ = 25 cm2 · V-1 · s-1, was found at ≈50% In content with a visible transmittance greater than 80%. The (001) layer spacing increased from ≈2.6 to 2.85 Å as the In content increased from 5 to 50%.

KW - Coatings

KW - Combinatorial

KW - Indium zinc oxide

KW - Sputtering

KW - Thin films

KW - Transparent conducting oxide

UR - https://www.scopus.com/pages/publications/10744223375

U2 - 10.1002/marc.200300231

DO - 10.1002/marc.200300231

M3 - Article

AN - SCOPUS:10744223375

SN - 1022-1336

VL - 25

SP - 344

EP - 347

JO - Macromolecular Rapid Communications

JF - Macromolecular Rapid Communications

IS - 1

ER -

Combinatorial Growth and Analysis of the Transparent Conducting Oxide ZnO/In (IZO)

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Keywords

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