Combinatorial Hot-Wire CVD Approach to Exploring Thin-Film Si Materials and Devices

Research output: Contribution to journal › Article › peer-review

NREL Publication Number

@article{b4eb669efce4416c8d02e4f711b423aa,

title = "Combinatorial Hot-Wire CVD Approach to Exploring Thin-Film Si Materials and Devices",

author = "NREL",

year = "2003",

doi = "10.1016/S0040-6090(03)00076-2",

language = "American English",

volume = "430",

pages = "78--82",

journal = "Thin Solid Films",

issn = "0040-6090",

publisher = "Elsevier",

number = "1-2",

}