Comparative Discharge Diagnostic Study of Silane, Disilane, and Germane RF Discharges Using Optical Emission Spectroscopy and Mass Spectrometry

Comparative Discharge Diagnostic Study of Silane, Disilane, and Germane RF Discharges Using Optical Emission Spectroscopy and Mass Spectrometry

Research output: Contribution to conference › Paper

Original language	American English
Pages	31-36
Number of pages	6
State	Published - 1988
Event	MRS Spring Meeting - Reno, Nevada Duration: 5 Apr 1988 → 8 Apr 1988

Conference

Conference	MRS Spring Meeting
City	Reno, Nevada
Period	5/04/88 → 8/04/88

Bibliographical note

Work performed by Glasstech Solar, Inc., Wheat Ridge, Colorado

NREL Publication Number

ACNR/CP-10490

Cite this

@conference{43741fa895574bb2a56c691a8194818c,

title = "Comparative Discharge Diagnostic Study of Silane, Disilane, and Germane RF Discharges Using Optical Emission Spectroscopy and Mass Spectrometry",

author = "NREL",

note = "Work performed by Glasstech Solar, Inc., Wheat Ridge, Colorado; MRS Spring Meeting ; Conference date: 05-04-1988 Through 08-04-1988",

year = "1988",

language = "American English",

pages = "31--36",

}