Comparative Discharge Diagnostic Study of Silane, Disilane, and Germane RF Discharges Using Optical Emission Spectroscopy and Mass Spectrometry

    Research output: Contribution to conferencePaper

    Original languageAmerican English
    Number of pages6
    StatePublished - 1988
    EventMRS Spring Meeting - Reno, Nevada
    Duration: 5 Apr 19888 Apr 1988


    ConferenceMRS Spring Meeting
    CityReno, Nevada

    Bibliographical note

    Work performed by Glasstech Solar, Inc., Wheat Ridge, Colorado

    NREL Publication Number

    • ACNR/CP-10490

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