@conference{51226e1669bd490ca5e58b0b8a850072,
title = "Comparative Study of Hot-Wire Chemical Vapor Deposition onto (100) Si Near 600 ..deg..C: Epitaxial and Polycrystalline Silicon Films: Paper No. 0989-A06-12",
keywords = "HWCVD, silicon films, solar cells",
author = "NREL",
year = "2007",
language = "American English",
pages = "121--125",
note = "Amorphous and Polycrystalline Thin-Film Silicon Science and Technology - 2007 Materials Research Society Symposium ; Conference date: 09-04-2007 Through 13-04-2007",
}