Comparative Study of Phosphosilicate Glass on (100) Silicon by Furnace and Rapid Isothermal Annealing

    Research output: Contribution to journalArticle

    Original languageAmerican English
    Pages (from-to)367-371
    Number of pages5
    JournalJournal of Applied Physics
    Issue number1
    StatePublished - 1991

    Bibliographical note

    Work performed by School of Electrical Engineering and Computer Science, University of Oklahoma, Norman, Oklahoma; Solar Energy Research Institute, Golden, Colorado; and Department of Mechanical Engineering, Wichita State University, Wichita, Kansas

    NREL Publication Number

    • ACNR/JA-213-12129

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