@article{f6c3c680179c4cb380b75e4cfb436c49,
title = "Comparative Study of Phosphosilicate Glass on (100) Silicon by Furnace and Rapid Isothermal Annealing",
author = "NREL",
note = "Work performed by School of Electrical Engineering and Computer Science, University of Oklahoma, Norman, Oklahoma; Solar Energy Research Institute, Golden, Colorado; and Department of Mechanical Engineering, Wichita State University, Wichita, Kansas",
year = "1991",
doi = "10.1063/1.347723",
language = "American English",
volume = "69",
pages = "367--371",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "1",
}