@article{791400fe5639422588fed1ff688ec1c1,
title = "Compensating Impurities as the Limiting Factor in Atmospheric Pressure Chemical Vapor Deposition of a-Si:H from Mg2Si Generated Higher Silanes",
author = "NREL",
note = "Work performed by Department of Chemistry, Harvard University, Cambridge, Massachusetts",
year = "1988",
doi = "10.1063/1.340121",
language = "American English",
volume = "63",
pages = "4669--4676",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics",
number = "9",
}