Conductive Conformal Thin Film Coatings for Textured PV, ALD Versus Sputtering: Paper No. 81100M

David Ginley; Arrelaine Dameron; Thomas Gennett; Steven Christensen; Maria Galante; Joseph Berry; Dane Gillaspie; John Perkins

doi:10.1117/12.894272

Conductive Conformal Thin Film Coatings for Textured PV, ALD Versus Sputtering: Paper No. 81100M

David Ginley, Arrelaine Dameron, Thomas Gennett, Steven Christensen, Maria Galante, Joseph Berry, Dane Gillaspie, John Perkins

National Renewable Energy Laboratory

Research output: Contribution to conference › Paper

Original language	American English
Number of pages	6
DOIs	https://doi.org/10.1117/12.894272
State	Published - 2011
Event	SPIE Conference - San Diego, California Duration: 22 Aug 2011 → 24 Aug 2011

Conference

Conference	SPIE Conference
City	San Diego, California
Period	22/08/11 → 24/08/11

NREL Publication Number

NREL/CP-5200-53550

Keywords

atomic layer deposition
conformal coatings
magnetron sputtering
trasnsparent conducting oxides

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10.1117/12.894272

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@conference{e1079969a984403aaa8424d00ace6ca6,

title = "Conductive Conformal Thin Film Coatings for Textured PV, ALD Versus Sputtering: Paper No. 81100M",

keywords = "atomic layer deposition, conformal coatings, magnetron sputtering, trasnsparent conducting oxides",

author = "David Ginley and Arrelaine Dameron and Thomas Gennett and Steven Christensen and Maria Galante and Joseph Berry and Dane Gillaspie and John Perkins",

year = "2011",

doi = "10.1117/12.894272",

language = "American English",

note = "SPIE Conference ; Conference date: 22-08-2011 Through 24-08-2011",

}

TY - CONF

T1 - Conductive Conformal Thin Film Coatings for Textured PV, ALD Versus Sputtering

T2 - SPIE Conference

AU - Ginley, David

AU - Dameron, Arrelaine

AU - Gennett, Thomas

AU - Christensen, Steven

AU - Galante, Maria

AU - Berry, Joseph

AU - Gillaspie, Dane

AU - Perkins, John

PY - 2011

Y1 - 2011

KW - atomic layer deposition

KW - conformal coatings

KW - magnetron sputtering

KW - trasnsparent conducting oxides

UR - http://www.scopus.com/inward/record.url?scp=80054075953&partnerID=8YFLogxK

U2 - 10.1117/12.894272

DO - 10.1117/12.894272

M3 - Paper

Y2 - 22 August 2011 through 24 August 2011

ER -

Conductive Conformal Thin Film Coatings for Textured PV, ALD Versus Sputtering: Paper No. 81100M

Conference

NREL Publication Number

Keywords

Access to Document

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