Conductive Conformal Thin Film Coatings for Textured PV, ALD Versus Sputtering: Paper No. 81100M

Research output: Contribution to conferencePaper

Original languageAmerican English
Number of pages6
DOIs
StatePublished - 2011
EventSPIE Conference - San Diego, California
Duration: 22 Aug 201124 Aug 2011

Conference

ConferenceSPIE Conference
CitySan Diego, California
Period22/08/1124/08/11

NREL Publication Number

  • NREL/CP-5200-53550

Keywords

  • atomic layer deposition
  • conformal coatings
  • magnetron sputtering
  • trasnsparent conducting oxides

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