Conformal Coating of Highly Structured Surfaces

David Ginley (Inventor), Joseph Berry (Inventor), Thomas Gennett (Inventor), John Perkins (Inventor)

Research output: Patent


Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface.
Original languageAmerican English
Patent number8,329,502
Filing date11/12/12
StatePublished - 2012

NREL Publication Number

  • NREL/PT-5F00-70205


  • 3 m Torr
  • amorphous structure
  • conformal coating
  • highly structured surface
  • layer deposited
  • substrate


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