Abstract
Method of applying a conformal coating to a highly structured substrate and devices made by the disclosed methods are disclosed. An example method includes the deposition of a substantially contiguous layer of a material upon a highly structured surface within a deposition process chamber. The highly structured surface may be associated with a substrate or another layer deposited on a substrate. The method includes depositing a material having an amorphous structure on the highly structured surface at a deposition pressure of equal to or less than about 3 mTorr. The method may also include removing a portion of the amorphous material deposited on selected surfaces and depositing additional amorphous material on the highly structured surface.
Original language | American English |
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Patent number | 8,329,502 |
Filing date | 11/12/12 |
State | Published - 2012 |
NREL Publication Number
- NREL/PT-5F00-70205
Keywords
- 3 m Torr
- amorphous structure
- conformal coating
- highly structured surface
- layer deposited
- substrate