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Conformal Coating of Highly Structured Surfaces
David Ginley
(Inventor)
,
Joseph Berry
(Inventor)
,
Thomas Gennett
(Inventor)
, John Perkins (Inventor)
Materials, Chemical, and Computational Science
Materials Science
Chemistry and Nanoscience
Research output
:
Patent
Overview
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Engineering
Conformal Coating
100%
Structured Surface
100%
Deposited Material
20%
Process Chamber
20%
Deposition Process
20%
Material Science
Surface (Surface Science)
100%
Amorphous Material
40%
Amorphous Material
20%