Abstract
Contactless measurement of important semiconductor parameters has become a popular trend of current semiconductor technology. Here we will describe an improved version of radio frequency photoconductive decay (RFPCD) operating in the ultra-high frequency (UHF) region. This work will show that the improved technique is capable of measuring samples ranging in size from submicron thin films to large silicon ingots. The UHF region is an ideal compromise for volume penetration and lifetime resolution with system response of 10 ns or less.
Original language | American English |
---|---|
Pages | 119-122 |
Number of pages | 4 |
DOIs | |
State | Published - 1997 |
Event | Proceedings of the 1997 IEEE 26th Photovoltaic Specialists Conference - Anaheim, CA, USA Duration: 29 Sep 1997 → 3 Oct 1997 |
Conference
Conference | Proceedings of the 1997 IEEE 26th Photovoltaic Specialists Conference |
---|---|
City | Anaheim, CA, USA |
Period | 29/09/97 → 3/10/97 |
Bibliographical note
For preprint version, including full text online document, see NREL/CP-530-22958NREL Publication Number
- NREL/CP-520-23488