Contamination of Silicon During Ion-Implantation and Annealing

Research output: Contribution to journal › Article › peer-review

Original language	American English
Pages (from-to)	407-410
Number of pages	4
Journal	Journal of Non-Crystalline Solids
Volume	227-230
DOIs	https://doi.org/10.1016/S0022-3093(98)00175-6
State	Published - 1998

NREL Publication Number

@article{8c6c0490a3174cdfa65bce1d8deb290b,

title = "Contamination of Silicon During Ion-Implantation and Annealing",

author = "NREL",

year = "1998",

doi = "10.1016/S0022-3093(98)00175-6",

language = "American English",

volume = "227-230",

pages = "407--410",

journal = "Journal of Non-Crystalline Solids",

issn = "0022-3093",

publisher = "Elsevier B.V.",

}