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Copper-Assisted, Anti-Reflection Etching of Silicon Surfaces
Fatima Toor (Inventor)
National Renewable Energy Laboratory
Research output
:
Patent
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Material Science
Silicon
100%
Surface (Surface Science)
85%
Nanoparticle
28%
Reflectivity
14%
Electroless Deposition
14%
Hydrogen Peroxide
14%
Oxidant
14%