CVD a-Si from Disilane: Reactor Analysis

CVD a-Si from Disilane: Reactor Analysis

Research output: Contribution to conference › Paper

Original language	American English
Number of pages	17
State	Published - 1984
Event	Photovoltaic Advanced Research and Development 6th Annual Review Meeting - Golden, Colorado Duration: 29 Oct 1984 → 31 Oct 1984

Conference

Conference	Photovoltaic Advanced Research and Development 6th Annual Review Meeting
City	Golden, Colorado
Period	29/10/84 → 31/10/84

Bibliographical note

Work performed by Institute of Energy Conversion and Department of Chemical Engineering, University of Delaware, Newark, Delaware

NREL Publication Number

ACNR/CP-6607

Cite this

@conference{abf0f61f8010443fa3d3d89adca3de72,

title = "CVD a-Si from Disilane: Reactor Analysis",

author = "NREL",

note = "Work performed by Institute of Energy Conversion and Department of Chemical Engineering, University of Delaware, Newark, Delaware; Photovoltaic Advanced Research and Development 6th Annual Review Meeting ; Conference date: 29-10-1984 Through 31-10-1984",

year = "1984",

language = "American English",

}