Damage-Layer-Mediated H Diffusion During SiN:H Processing: A Comprehensive Model

Research output: Contribution to conference › Paper

Original language	American English
Pages	Vol. 2: 1028-1031
Number of pages	4
DOIs	https://doi.org/10.1109/WCPEC.2006.279294
State	Published - 2006
Event	2006 IEEE 4th World Conference on Photovoltaic Energy Conversion (WCPEC-4) - Waikoloa, Hawaii Duration: 7 May 2006 → 12 May 2006

Conference	2006 IEEE 4th World Conference on Photovoltaic Energy Conversion (WCPEC-4)
City	Waikoloa, Hawaii
Period	7/05/06 → 12/05/06

NREL Publication Number

@conference{222f23495d91400bbd2eb1582e65777b,

title = "Damage-Layer-Mediated H Diffusion During SiN:H Processing: A Comprehensive Model",

author = "NREL",

year = "2006",

doi = "10.1109/WCPEC.2006.279294",

language = "American English",

pages = "Vol. 2: 1028--1031",

note = "2006 IEEE 4th World Conference on Photovoltaic Energy Conversion (WCPEC-4) ; Conference date: 07-05-2006 Through 12-05-2006",

}