Defect Analysis of Thin Film Si-Based Alloys Deposited by Hot-Wire CVD Using Junction Capacitance Methods

    Research output: Contribution to journalArticlepeer-review

    Original languageAmerican English
    Pages (from-to)663-669
    Number of pages7
    JournalThin Solid Films
    Volume516
    Issue number5
    DOIs
    StatePublished - 2008

    NREL Publication Number

    • NREL/JA-520-42932

    Keywords

    • amorphous materials
    • hot-wire depostion
    • optical spectroscopy
    • silicon germanium alloys
    • solar cells

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