Defects and Future Silicon Technology

Defects and Future Silicon Technology

Research output: Contribution to conference › Paper

Original language	American English
Pages	703-711
Number of pages	9
State	Published - 1995
Event	Defect and Impurity Engineered Semiconductors and Devices: Materials Research Society Symposium - San Francisco, California Duration: 17 Apr 1995 → 21 Apr 1995

Conference

Conference	Defect and Impurity Engineered Semiconductors and Devices: Materials Research Society Symposium
City	San Francisco, California
Period	17/04/95 → 21/04/95

Bibliographical note

Work performed by the Massachusetts Institute of Technology, Cambridge, Massachusetts

NREL Publication Number

NREL/CP-20543

Cite this

@conference{7dde7ba6b24346f1902acf6af2ff8fcd,

title = "Defects and Future Silicon Technology",

author = "NREL",

note = "Work performed by the Massachusetts Institute of Technology, Cambridge, Massachusetts; Defect and Impurity Engineered Semiconductors and Devices: Materials Research Society Symposium ; Conference date: 17-04-1995 Through 21-04-1995",

year = "1995",

language = "American English",

pages = "703--711",

}