Abstract
Molybdenum (Mo) thin films were sputtered onto soda lime glass (SLG) substrates. The main variable in the deposition parameters, the argon (Ar) pressure pAr, was varied in the range of 6 - 20 mTorr. Ex situ spectroscopic ellipsometry (SE) was performed to find out that the dielectric functions of the Mo films were strongly dependent on pAr, indicating a consistent and significant decrease in theMo film density pMo with increasing pAr. This trend was confirmed by high-angle-annular-dark-field scanning transmission electron microscopy. Dielectric functions of Mo were then found to be correlated with secondary ion mass spectroscopy profiles of Sodium (Na) in the Cu(InxGa1-x)Se2 (CIGS) layer grown on top of Mo/SLG. Therefore, in situ optical diagnostics can be applied for processmonitoring and optimization in the deposition of Mo for CIGS solar cells. Such capability is demonstrated with simulated optical transmission and reflectance of variously polarized incident light, using dielectric functions deduced from SE.
| Original language | American English |
|---|---|
| Number of pages | 6 |
| State | Published - 2011 |
| Event | 37th IEEE Photovoltaic Specialists Conference (PVSC 37) - Seattle, Washington Duration: 19 Jun 2011 → 24 Jun 2011 |
Conference
| Conference | 37th IEEE Photovoltaic Specialists Conference (PVSC 37) |
|---|---|
| City | Seattle, Washington |
| Period | 19/06/11 → 24/06/11 |
NREL Publication Number
- NREL/CP-5200-50701
Keywords
- CIGS
- molybdenum thin films
- PV
- sodium diffusion
- solar cells